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NanoTube N1 60 kV

Uncompromising Nano Performance

The Nanotube N1 60 kV is based on advanced electron optics refined from the workhorse MetalJet e-beam platform and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible truly round spot is achieved at any voltage and current setting. The NanoTube furthermore have the unique feature that it internally measures and reports the current spot size. In addition advanced cooling and thermal design results in extreme stability over long exposures. All in all this enables an unprecedented true resolution of  150 nm lines and spaces. 

 

 

 

 

 

 

NanoTube new w324

 

 

 

Features and Benefits

  • Superior spot quality with automatic e-beam focusing and astigmatism correction

  • Internal absolute spot size measurement

  • Tungsten-diamond transmission target

  • LaB6 long-life cathode

 
  • Integrated cooling for ultimate spot stability

  • Wedge shaped front for excellent geometrical access to X-ray spot

  • Controlled through user friendly GUI or
    remotely through TCP/IP protocol

 

Resolution Examples

jima 150 200  

Examples of 150 and 200 nm lines and spaces on the standard JIMA RT RC-04
resolution chart clearly resolved.

From experiment in collaboration with Fraunhofer EZRT using a Si Timepix detector.

Projection radiographs of the standard JIMA RT RC-04 150 nm (left) and 200 nm (right) resolution pattern captured using the NanoTube.    
     
siemens star sem xray  

The true round spot of the NanoTube is demonstrated by the highly symmetric
images of a Siemens-star resolution target. The innermost features are 150 nm.

From experiment in collaboration with Fraunhofer IIS (NanoCT systems) using a Dectris PILATUS3 X CdTe 300K-W detector.

SEM micrograph of a siemens star on the left, and a projection radiograph captured using the NanoTube on the right.    

  

 

Positional Stability Example 

Thanks to the advanced e-beam system of the NanoTube and the integrated thermal control, excellent long term stability is achieved. This graph illustrates the motion of the image (in object coordinates) of the Siemens star mentioned above over 400 exposures during 11 h. It is worth noticing that this image motion also includes motion of the complete setup with sample, stages and detector etc., so that the actual motion of the X-ray spot is smaller.

   motion data graph

 

Excellent Geometrical Access

geometrical access new   

The end of the transmission target is the most protruding surface to allow for object to get as close as possible.

 

The front is furthermore wedged to allow for a sturdy cone-shaped object holder.

 

Technical Specifications

Voltage

10-60 kV

 

Best resolution

150 nm (lines and spaces e.g. JIMA)

Max. emitted power

6 W

 

Target material

Tungsten (W) on diamond

Max. power abosrbed in anode

5 W

 

Target type

Transmission

Min. focus-object distance

100 µm

 

Long term spot stability

< 50 nm 1

1) Standard deviation over several hours after initial warm-up

 

Data Sheets

 

NanoTube N1 60 kV 2017 06 12 1 thumb 

Download the pdf here for more information

 

 

 

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The development of the NanoTube has been partly funded by the European Union Seventh Framework Programme (FP7/2007-2013) through Excillum’s participation the NanoXCT program (grant agreement no 280987)