The world's smallest X-ray nanospot
NanoTube N3
The Excillum NanoTube N3 enables industry-leading 150 nm resolution in geometric-magnification X-ray imaging systems up to 160 kV depending on source model. High flux and exceptional spot stability make the source ideal for demanding 3D computed tomography applications as well as 2D imaging in both industrial and research environments.
The Excillum NanoTube N3 is based on advanced electron optics and the latest tungsten-diamond transmission target technology. Automatic e-beam focusing and astigmatism correction ensures that the smallest possible, truly round spot is consistently achieved during day to day operation.
The NanoTube N3 also has the unique feature of internally measuring and reporting the current spot size. In addition, advanced cooling and thermal design results in extreme stability over long exposures. This enables an unprecedented true resolution of 150 nm lines and spaces.
NanoTube series
NanoTube N3 60 kV
NanoTube N3 110 kV
NanoTube N3 160 kV
Features and benefits
- Superior spot quality with automatic e-beam focus of true round spot
- 150 nm resolution consistently and automatically achieved across full kV range
- Internal absolute spot size measurement
- Long-life cathode
- Variable spot size and power setpoints with unchanged spot position
- Cone-shaped front for excellent geometrical access to X-ray spot
Contact us about the NanoTube X-ray source
Technical specifications NanoTube N3 60 kV
Voltage | 40-60 kV | Max. power on target | 3.6 W |
High brightness emitter | LaB6 | Target material | Tungsten (W) on diamond |
Min. resolution | 150 nm | Target type | Transmission |
Min. focus-object distance | 150 µm | Long term spot stability | < 100 nm1 |
Technical specifications NanoTube N3 110 kV
Voltage | 40-110 kV | Max. power on target | 9.2 W |
High brightness emitter | LaB6 | Target material | Tungsten (W) on diamond |
Min. resolution | 150 nm | Target type | Transmission |
Min. focus-object distance | 150 µm | Long term spot stability | < 100 nm1 |
Technical specifications NanoTube N3 160 kV
Voltage | 40-160 kV | Max. power on target | 16.6 W |
High brightness emitter | LaB6 | Target material | Tungsten (W) on diamond |
Min. resolution | 150 nm | Target type | Transmission |
Min. focus-object distance | 150 µm | Long term spot stability | < 100 nm1 |
1) Standard deviation over >8 hours when operating at fix settings after >30 minutes thermal settling.