High resolution non-destructive nano-CT of 3D package
Investigation of a 3D package with hollow core through package vias (TPV) and 3D redistribution layers (RDL) with the NanoTube N3. The metal thickness is around 7 µm and roughness can clearly be seen. In addition, improper metalization etc can be detected. A virtual cross section from the 3D X-ray measurement is compared to a SEM cross section.
